Wafer probe station with integrated environment control enclosure

Wafer-Prüfstation mit integrierter Umgebungskontroleinrichtung

Station de test pour galette de silicium avec enveloppe à côntrole d'environnement intégré

Abstract

A wafer probe station is equipped with a compact, integrated controlled-environment enclosure (42,44) providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck (80) and test probe (30) provided by the enclosure is maintained despite the fact that the probe and chuck positioning mechanisms (24,16) extend partially outside the enclosure, with positioning members extending movably between the interior and exterior of the enclosure. Sealing is maintained by movable sealing members at the locations where the positioning members penetrate the enclosure.

Claims

Description

Topics

Download Full PDF Version (Non-Commercial Use)

Patent Citations (2)

    Publication numberPublication dateAssigneeTitle
    DE-3114466-A1March 11, 1982Hitachi LtdSystem zum antreiben eines drehbaren glieds im vakuum
    US-3333274-AJuly 25, 1967Micro Tech Mfg IncTesting device

NO-Patent Citations (1)

    Title
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT vol. 38, no. 6, December 1989, NEW YORK US pages 1088 - 1093 YOUSOUKE YAMAMOTO 'A COMPACT SELF SHIELDING PROBER FOR ACCURATE MEASURE MENT OF ON-WAFER ELECTRON DEVICES'

Cited By (5)

    Publication numberPublication dateAssigneeTitle
    DE-9408512-U1September 21, 1995Hoeflschweiger NikolausTeststation
    EP-0574149-B1November 25, 1998Cascade Microtech, Inc.Wafer probe station having integrated guarding, Kelvin connection and shielding systems
    US-6445202-B1September 03, 2002Cascade Microtech, Inc.Probe station thermal chuck with shielding for capacitive current
    US-6512391-B2January 28, 2003Cascade Microtech, Inc.Probe station thermal chuck with shielding for capacitive current
    US-6642732-B2November 04, 2003Cascade Microtech, Inc.Probe station thermal chuck with shielding for capacitive current